[comp.lsi] looking for e-beam resist

rvdp@cs.vu.nl (Ronald van der Pol) (02/09/90)

I am reposting this message because I didn't get any reactions last
year. Please ask your local physics or electrical engineering
department if they can give any information. I would be very
grateful!

	Does anyone know a source of M-SNR? This is a novel kind
of Silicon-based Negative e-beam Resist, which is reported to be
more sensitive to UV light.
	M-SNR is supposed to be commercially available, but
we have been unable to locate any source.
	If you can help us, please reply by email.

Any information about M-SNR would be welcome.

Thanks in advance,
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		Ronald van der Pol  <rvdp@cs.vu.nl>
These are the days of miracle and wonder, this is a long distance call....