br@cs.strath.ac.uk (Bruce Rodger - Optoelectronics) (08/14/90)
Our research group is involved with the design and development of resonant sensors, utilising silicon micromachining techniques to fabricate these devices in Si wafers. The excitation/detection techniques we use are all-optical, and so we are primarily interested in the mechanical (and optical!) properties of these devices. Their electronic properties are of little interest to us at present. The devices we produce are geometrically simple, and so far we have had no need for CAD tools. However, I am now investigating the availability of software tools for 2 applications. These are : 1. Simple mask design. We require a package for laying out simple masks, preferably producing output in a format which can be sent directly to the company which manufactures masks for us. 2. Modelling of Anisotropic Etching of Silicon by EDP or KOH what we require is a package which, given the geometry of the mask windows, will produce an output depicting the evolution of the etched surface. Ideally, the software would be public domain / free / cheap , although this is not essential. The hardware on which the programs should run is not critical - we have a fairly large number of machines available. (e.g. Sun 3 running Xwindows or Sunview, HP workstations and various other UN*X boxes running Xwindows, VAXen running VMS, PCs, etc etc etc) I would be very grateful to hear from anyone who knows of suitable packages. Thanks in Advance Bruce. Mail sent to the above address will reach me, however my preferred address is : =============================================================================== R.B. Rodger |JANET: R.B.Rodger@uk.ac.strath.vaxa OptoElectronics Group |Internet:R.B.Rodger@vaxa.strath.ac.uk Elec. Eng. Dept |BITNET: R.B.Rodger%vaxa.strath.ac.uk@UKACRL Strathclyde University|UUCP: R.B.Rodger%vaxa.strath.ac.uk@ukc.uucp Glasgow G1 1XW | Scotland, UK | ==============================================================================