dunc@eecg.toronto.edu (Duncan Elliott) (01/03/90)
Electrical Engineering Computer Group
Cider Seminar Series
Fabrication and Characterization of
High-Temperature Superconductor Thin Films
by
David Chin
Department of Electrical Engineering
UC Berkeley
Time: Friday, Jan. 5, 1990, 12:05 --- Place: GB 220
Superconductive electronic systems made of high-temperature
superconducting materials would combine the advantages of high
operating speed, low power dissipation, and relatively low
refrigeration costs. High-temperature superconductive thin films
are essential to a high-temperature superconductive system. Being
able to fabricate those thin films with high quality is the first
step of a long journey towards high-temperature superconductive
systems.
We are routinely depositing high-quality in-situ high-Tc YBaCuO
thin films by RF magnetron sputtering from a single stoichiometric
target using an off-axis configuration. The as-deposited films on
MgO and SrTiO3 substrates are superconducting with Tc(R=0) greater
than 83 K. The critical current density of the films exceed 106
A/cm2.
The films have been characterized by various analytical
techniques. Rutherford backscattering spectra show that the
compositions of the films are close to that of the target. An ion
channeling experiment shows that films on MgO substrates are highly
epitaxial. We have determined from X-ray spectra and transmission
electron micrographs that the films are highly crystallized with the
c-axis of the orthorhombic crystal perpendicular to the surface to
the films.
In this talk, the deposition process and analytical techniques
of the high-quality superconductor thin films will be discussed.
Coming Soon
Date Who Topic
Jan. 19 Pierre Delisle A Load Balancing Facility for Distributed Systems
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Note that the Cider Seminar Series has been moved to
Galbraith 220 for the spring term.