bnevin@CCH.BBN.COM ("Bruce E. Nevin") (02/16/88)
Subject: not-yet-nano technology
Originally
From: "Anita M. Flynn" <ANITA%OZ.AI.MIT.EDU@XX.LCS.MIT.EDU>
Subject: motor on a chip!
Wednesday, Feb 17th, 4:00 NE-43 - 8th floor playroom
MICRO MOTORS
Stephen F. Bart Theresa A. Lober Lee S. Tavrow
Laboratory for Electromagnetic and Electronic Systems
Microsystems Technology Laboratory
Silicon microfabrication technology has recently allowed development
of new sensing technologies for interfacing with the non-electronic
world. Many of these microsensors rely on micromechanical structures
fabricated by the selective etching of the silicon substrate or
deposited thin films. In contrast, research on microfabricated
actuators (microactuators) has been largely neglected. Conventional
microstructures, such as cantilever beams, bridges, and diaphragms,
are able to move only a few micrometers perpendicular to the plane of
the substrate. This restrained travel in one degree of freedom has
restricted existing microactuators to small-motion applications.
A flexible microactuator technology requires structures that have
unrestrained motion in at least one degree of freedom. By means of a
straightforward extension of surface micromachining, thin-film disks
or plates can be made which are free to rotate or slide over the
surface of the substrate. The addition of some means of applying an
electromechanical force opens a multitude of possibilities for
developing "micromotors".
This talk will discuss some of the electromechanical issues that
influence the design of the motor drive (electrostatic vs. magnetic,
for example). The work that has taken place at MIT to date will be
examined. Finally, there will a discussion of the possible
applications for such a technology.