[sci.electronics] Accelerometers on a chip

rww@esl.UUCP (Richard W. Webb) (08/02/88)

Hello Electronics experts,
	I remember reading recently (in the last 3 months) about a design
    of a small chip based accelerometer.  The principle was that of a
    variable capacitor, where the movable plate was actually a piece
    of deposited metal that overhung another metal well.

                     ^
                     | Acceleration causes bending of the metal overhang.
                     v
   \__________    __________________________/
    XXXXXXXXXX\___________________XXXXXXXXXX
    XXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXX

    The amount of acceleration is detected as a change in the capacitance
    between the plates of the air gap as the metal overhang bends.  The
    degree of bending is slight, but the device can be made more sensitive
    by making the length of the overhang larger.  Fast response is not a
    vital factor for our application either, as the sampling rates are
    at most 100 Hz.

	Some of my friends and myself are interested in producing small
    scale seismographs to monitor earthquakes in the California area.
    We currently have two (2) classical mechanical seismographs.  But
    now we are looking into the possibility of using single chip
    accelerometers as the sensing elements in a network of seismographs.

	Any references to actual sensors like these, articles about such
    sensors, or any other related types of sensors would be greatly
    appreciated.

	Thanks,
-- 
Richard W. Webb                           ecvax!decwrl!borealis!\
ESL Inc.  MS/302                                 sdcsvax!seismo!- ames!esl!rww
495 Java Drive           (408) 738-2888 x5729     ucbcad!ucbvax!/     /
Sunnyvale, CA  94088     SMAIL: rww@esl.ESL.COM         ihnp4!lll-lcc!

henry@utzoo.uucp (Henry Spencer) (08/03/88)

In article <740@esl.UUCP> rww@esl.UUCP (Richard W. Webb) writes:
>	I remember reading recently (in the last 3 months) about a design
>    of a small chip based accelerometer...

I suspect that they are not sensitive enough for seismic work, although
I could be wrong.  It's likely that eventually they will be, mind you...
One notion that's being pursued at the research stage is adding a
scanning-tunneling-microscope probe to the bottom of the sensing mass,
so that movements of a fraction of an atomic diameter can be detected;
this would be several orders of magnitude more sensitive than the best
accelerometers (of any kind) built to date.
-- 
MSDOS is not dead, it just     |     Henry Spencer at U of Toronto Zoology
smells that way.               | uunet!mnetor!utzoo!henry henry@zoo.toronto.edu

commgrp@silver.bacs.indiana.edu (08/03/88)

>    I remember reading recently (in the last 3 months) about a 
>design of a small chip based accelerometer.  The principle was 
>that of a variable capacitor, where the movable plate was 
>actually a piece of deposited metal that overhung another metal 
>well.
>
>        ^
>        | Acceleration causes bending of the metal overhang.
>        v
>__________    __________________________/
>XXXXXXXXXX\___________________XXXXXXXXXX
>XXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXXX
>
>The amount of acceleration is detected as a change in the 
>capacitance between the plates of the air gap as the metal 
>overhang bends...

>Some of my friends and myself are interested in producing small
>scale seismographs to monitor earthquakes in the California area.
>We currently have two (2) classical mechanical seismographs.  But
>now we are looking into the possibility of using single chip
>accelerometers as the sensing elements in a network of seismographs.

>Thanks
>-- 
>Richard W. Webb                           ecvax!decwrl!borealis!\


I don't know where to get silicon accelerometers; they're 
probably very expensive. I once worked with silicon strain-
gauges, which are extremely sensitive but have enormous 
temperature coefficients.

Seismographs usually require a LARGE mass to detect acceleration 
at extremely low frequencies.  An electronic accelerometer could 
be made using a mass attached to an LVDT (linear variable 
differential transformer), which is a transformer in a bridge 
configuration which is unbalanced by slight movements of its 
core. The associated electronics can be complex but there's a New 
Chip made especially for LVDT interface; the chip includes the AC 
exciter. I can't remember its number or manufacturer; Don 
Lancaster told me about it last month when I met him at the 
National Speleological Society convention. He will describe it in 
an upcoming "Hardware Hacker" column in _Radio Electronics_ 
magazine. Don says this chip should also make a nice bridge-
balance-type metal detector.

Another LVDT configuration is the "force-balance" transducer:  
Displacement of the LVDT core produces an error signal for a 
negative-feedback circuit which drives a DC solenoid which 
opposes the displacement, driving the LVDT back to center. The DC 
output is proportional to the applied force. This system is used 
in electronic scales.  A friend who used to work with these says 
that LVDT's are easy to build; I don't know the details.

--

Frank
reid@gold.bacs.indiana.edu

chris@spock (Chris Ott) (08/08/88)

Frank (reid@gold.bacs.indiana.edu) writes:
> >
> > [Stuff about silicon accelerometers deleted]
> >Richard W. Webb                           ecvax!decwrl!borealis!\
>
> [Stuff about LVDT's deleted]
>
> Frank
> reid@gold.bacs.indiana.edu

     We are also using LVDT's for a project. I feel I should mention they
are very accurate. We are using them to measure something to within 1/1000
of an inch. Anyway, here's where we got them:

     Schaevitz Engineering
     U.S. Route 130 & Union Avenue
     Pennsauken, NJ  08110

     Tex  (609) 662-8000

     Relevant technical bulletins: #7003B, #7007, #1002E

I don't know how much the LVDT's cost, but the driver circuit, which is
available from the same company, costs about $125. If you know the theory,
you could probably build one yourself. They explain how an LVDT works in
one of those technical manuals.

Hope that helps.

-------------------------------------------------------------------------------
 Chris Ott                  Internet: chris@spock.ame.arizona.edu
 Computational Fluid        UUCP: {allegra,cmcl2,hao!noao}!arizona!
   Mechanics Lab                   amethyst!spock!chris
 University of Arizona
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