[net.lsi] E-Beam Mask Making

slawson@sfucmpt (Fred Slawson) (09/27/83)

Is anyone out there working on the production of pattern generation tapes
for electron-beam mask-writing machines?  Or do you know anyone who is?
Specifically I am interested in two areas of research:
1) development of improved algorithms for fracturing general
   polygons into e-beam machine quadrilaterals, and
2) optimization of e-beam machine control (sequencing of pattern
   rasterization versus stage movement).