slawson@sfucmpt (Fred Slawson) (09/27/83)
Is anyone out there working on the production of pattern generation tapes for electron-beam mask-writing machines? Or do you know anyone who is? Specifically I am interested in two areas of research: 1) development of improved algorithms for fracturing general polygons into e-beam machine quadrilaterals, and 2) optimization of e-beam machine control (sequencing of pattern rasterization versus stage movement).